Internet address(es):

Main address: http://www.dtu.dk/

Acquisition of automated photoresist coater tool.

DTU Danchip intends to purchase an automated photoresist coater tool from Süss microtec GmbH.

The tool has the following characteristics:

— Fully automated cassette-to-cassette operation;

— 2 cassette stations;

— Robot handler, able to handle both 2 inch and 4/6 inch wafers without tool modifications;

— One coater station for coating 2 inch substrates:

— 3 resist dispense lines;

— 1 resit dispense syringe;

— Edge bead removal nozzle;

— Backside rinse;

— One coater station for coating 4 inch substrates:

— 4 resist dispense lines;

— Edge bead removal nozzle;

— Backside rinse;

— 4 hot plates;

— 1 cool plate;

— 1 HMDS primer oven.

DTU Danchip is ISO 9001 certificed, and photolithography is one of the decisive quality objectives in Danchip's certification. Purchasing a similar spin coater facilitates a full backup with regards to DTU Danchip's QA/QC processes.

DTU Danchip already owns four Gamma 2M systems installed — 2 resist coaters and 2 developers. This common platform makes recipe portability across machines very easy. Transferral of recipes to a different tool would require the process engineer manpower of approximately 1.5 full time equivalents.

Furthemore, systems can act as each other's backup. Another platform tool would not provide the same kind of backup, and DTU Danchip would need to spend a considerably larger sum of money on spare parts inventory. Tools from the same platform can draw from the same pool of local spare parts.

DTU Danchip has a set of special machine parts for handling of non-standard wafer sizes. With a common platform, these parts can be shared between tools, thus reducing capital expenditure on non-standard parts.

In a multi-user facility like Danchip with 350 registered users at any given time and around 150 new users per year, a common tool platform secures large savings in training and education.

Internet address:https://erhvervsstyrelsen.dk/klagenaevnet-for-udbud

Complaints must be sent to the Complaints Board for Public Procurement within a certain deadline. Complaints regarding a decision on shortlisting in a restricted procedure must be received in the Board within 20 days, after the contracting authority's notification of the outcome of the shortlisting. Other complaints must be received in the Board within 45 days from the day after publication of the contracting authority's notice in (TED) about entering into a contract. If the subject for the tender is a framework contract, the deadline is 6 months from the contracting authority's notice to the tenderers about the tenderer which the contracting authority intends to enter into contract with. Complaints regarding the national regulations for tender procedures (Tilbudsloven) must be received at the Board within 45 days after the contracting authority have notified the Tenderers about the tenderer which the contracting authority intends to enter into contract with. If the complaint is regarding a framework agreement the deadline is 6 months after the contracting authority has notified the Tenderers about the Tenderer which the contracting authority intends to enter into contract with.

Internet address:http://www.kfst.dk/