Fakta om udbudet
Udbyder
Københavns Universitet
Vindere
(19.05.2017)
SEMTech Solutions Inc.
6 Executive Park Drive
MA 01862 North Billerica
Acquisition of an Elionix ELS-F125 to the Danish national scientific infrastructure center Quantech, The Niels Bohr Institute, University of Copenhagen
Københavns Universitet
Voluntary ex ante transparency notice
Supplies
Section I: Contracting authority/entity
Nørregade 10
Copenhagen
1017
Denmark
Contact person: Caroline Volf
Telephone: +45 35333391
E-mail: caroline.volf@adm.ku.dk
NUTS code: DK011
Internet address(es):
Main address: www.oko.ku.dk
Section II: Object
Acquisition of an Elionix ELS-F125 to the Danish national scientific infrastructure center Quantech, The Niels Bohr Institute, University of Copenhagen.
Quantech is a new national center whose infrastructure is to be installed and administered by several universities in Denmark. The present procurement is carried out by The Niels Bohr Institute at University of Copenhagen. Quantech will provide electron-beam lithography and other services to academia and industry within the emerging quantum technologies.
As part of the new Danish national scientific infrastructure center Quantech, The Niels Bohr Institute at University of Copenhagen is procuring an instrument for electron-beam lithography for development of nanoscale components for quantum technologies. Quantech is an open facility with a projected used base comprised of both academia, SMEs, and established high-tech companies.
Section IV: Procedure
- The procurement falls outside the scope of application of the directive
According to the European Parliament and Council Directive No. 2014/24/ EC, Article 32. 2, point b, the University of Copenhagen believes that the present system from Elionix is the only system in the world that meets our requirements. A critical parameter for the Quantech center in competition with other facilities in Denmark and Sweden is the proximity error, which is very sensitive to the acceleration voltage. The higher the acceleration voltage, the smaller the proximity error. Only one company in the world produces electron beam lithography systems with >100 kV and that is Elionix Inc. who produce a 125 kV system. This is the state of the art and the only product of its kind. Additionally, we need a compact footprint, high throughput, upgradability to automatic wafer loader, linewidths down to 5 nm, stitching accuracy of at maximum ±10 nm and overlay accuracy of at maximum ±15 nm, and these specifications are met by the present instrument.
According to the European Parliament and Council Directive No. 2014/24/ EC, Article 32. 3, point d, University of Copenhagen is convinced that the acquisition will be made on particularly favorable terms that can not be matched by tendering as there is already another electron-beam lithography system from Elionix installed in the building where the present machine is to be installed. In order to share knowledge amongst technical staff, save money on service contracts, and generally exploit synergies, we prefer buying the present system from Elionix.
Section V: Award of contract/concession
6 Executive Park Drive
North Billerica
MA 01862
United States
Telephone: +1 9786639822
E-mail: gerry@semtechsolutions.com
NUTS code: 00
Internet address:http://www.semtechsolutions.com
Section VI: Complementary information
Dahlerups Pakhus, Langelinie Allé 17
København Ø
2100
Denmark
Telephone: +45 35291000
E-mail: klfu@erst.dk
Internet address:http://www.klfu.dk
Carl Jacobsens Vej 35
Valby
2500
Denmark
Telephone: +45 41715000
E-mail: kfst@kfst.dk
Internet address:http://www.kfst.dk