Internet address(es):

Main address: http://www.aau.dk

Plasma cleaning system for an academic R&D prototype laboratory.

Aalborg University Department of Energy Technology needs to purchase a plasma cleaning system for an academic R&D prototype laboratory.

Aalborg University Department of Energy Technology have of technical reasons only found 1 supplier that can deliver a plasma cleaning system that fulfils the university's requirements as described in section II.2.4.

The system is to be used for cleaning and preprocessing: copper lead frames, PCBs, direct bonded copper power substrates and power module sub-assemblies. Processing quality is essential at many levels since subsequent processing elsewhere in the prototype lab imposes high quality requirements on cleaned surfaces. As e.g. copper surfaces are very reactive with some gas species the requirement for purity of the gas system during processing is very high and it is required that a pure argon process (no gas mixtures) with bare copper lead frames can be run at high power (≈5 mins at ≈300 W or higher) without deposition of impurities (e.g. no oxidation of the copper) in the gas system. Similarly, due to prototype requirements, the system should have a very uniform plasma and cleaning action (maximum a few percent variation across processing shelf). Furthermore, it is also key that highly skilled technical support and connected test centres are available in EU within very short time to aid in resolving and optimising processes if needed.

The plasma cleaning system is a 13.56 MHz unit with controllable power up to 300 W and should be equipped with 2 electronic mass flow controlled gas lines supporting argon on one line and oxygen on the other. As such, the vacuum pump should be compatible with oxygen processes. The system needs a large process chamber (at least 30 L) which support multiple shelf configuration; flexibility in shelf arrangement; large shelf size of (at least 180×300 mm) to accommodate a large variety of sample types. Due to lab space requirement, the system is not to be larger than 60×90×75 cm (W×D×H) height, not including vacuum pumps or control PC.

Aalborg University Department of Energy Technology have of technical reasons only found one supplier that can deliver a plasma cleaning system that fulfils the university's requirements as described in section II.2.4.

Internet address:www.mpenordic.com

Internet address:https://erhvervsstyrelsen.dk/klagenaevnet-for-udbud

Internet address:http://www.kfst.dk/