Fakta om udbudet
Udbyder
Kungliga Tekniska högskolan
Procurement of a Vapour Hydrofluoric Acid (HF) Etcher
Kungliga Tekniska högskolan
Contract award notice
Results of the procurement procedure
Supplies
Directive 2014/24/EU
Section I: Contracting authority
202100-3054
Brinellvägen 8
Stockholm
100 44
Sweden
Contact person: Marina Busk
E-mail: mbusk@kth.se
NUTS code: SE11
Internet address(es):
Main address: http://www.kth.se
Section II: Object
Procurement of a Vapour Hydrofluoric Acid (HF) Etcher
KTH intends to purchase one etching instrument that uses anhydrous hydrofluoric acid (aHF) vapour to etch sacrificial silicon dioxide (SiO₂) in the release etch of microelectromechanical (MEMS) devices.
The content of this invitation to tender is an upgrade of the KTH clean-room free-etching capabilities.
The activities of the main users of this tool are primarily focussing on microfabrication of MEMS and photonics devices.
The principal application of the procured instrument is to employ anhydrous hydrofluoric acid (aHF) for etching sacrificial silicon dioxide (SiO₂) with very high selectivity, and without stiction, in the release etch of microelectromechanical (MEMS) devices made in silicon (Si), poly-Si, and aluminium (Al) structural materials. The new aHF instrument will primarily be used for research and development of the release of silicon MEMS devices on silicon on insulator (SoI) wafers.
The offered instrument must be a complete vapour hydroflouric acid (HF) etcher of clean-room grade.
The instrument must be offered with a suitable maintenance kit for two years of planned instrument maintenance without extra cost.
1) A suitable process vacuum pump for the instrument;
2) A suitable HF abatement unit (scrubber).
Section IV: Procedure
Section V: Award of contract
Section VI: Complementary information
Motivation for cancelling
The reason for cancellation is an insufficient degree of competition due to the fact that, only one tender is qualified, i.e. has fulfilled all mandatory requirements.
Visma notice: https://opic.com/id/affevqjfui
Stockholm
Sweden