Fakta om udbudet

2019/S 133-326722


Kungliga Tekniska högskolan

Procurement of a Vapour Hydrofluoric Acid (HF) Etcher

Kungliga Tekniska högskolan

Contract award notice

Results of the procurement procedure


Legal Basis:

Directive 2014/24/EU

Section I: Contracting authority

I.1) Name and addresses
Kungliga Tekniska högskolan
Brinellvägen 8
100 44
Contact person: Marina Busk
E-mail: mbusk@kth.se
NUTS code: SE11

Internet address(es):

Main address: http://www.kth.se

I.2) Information about joint procurement
I.4) Type of the contracting authority
National or federal agency/office
I.5) Main activity

Section II: Object

II.1) Scope of the procurement
II.1.1) Title:

Procurement of a Vapour Hydrofluoric Acid (HF) Etcher

Reference number: V-2019-0242
II.1.2) Main CPV code
II.1.3) Type of contract
II.1.4) Short description:

KTH intends to purchase one etching instrument that uses anhydrous hydrofluoric acid (aHF) vapour to etch sacrificial silicon dioxide (SiO₂) in the release etch of microelectromechanical (MEMS) devices.

The content of this invitation to tender is an upgrade of the KTH clean-room free-etching capabilities.

The activities of the main users of this tool are primarily focussing on microfabrication of MEMS and photonics devices.

II.1.6) Information about lots
This contract is divided into lots: no
II.2) Description
II.2.1) Title:
II.2.2) Additional CPV code(s)
II.2.3) Place of performance
NUTS code: SE110
II.2.4) Description of the procurement:

The principal application of the procured instrument is to employ anhydrous hydrofluoric acid (aHF) for etching sacrificial silicon dioxide (SiO₂) with very high selectivity, and without stiction, in the release etch of microelectromechanical (MEMS) devices made in silicon (Si), poly-Si, and aluminium (Al) structural materials. The new aHF instrument will primarily be used for research and development of the release of silicon MEMS devices on silicon on insulator (SoI) wafers.

The offered instrument must be a complete vapour hydroflouric acid (HF) etcher of clean-room grade.

The instrument must be offered with a suitable maintenance kit for two years of planned instrument maintenance without extra cost.

II.2.5) Award criteria
II.2.11) Information about options
Options: yes
Description of options:

1) A suitable process vacuum pump for the instrument;

2) A suitable HF abatement unit (scrubber).

II.2.13) Information about European Union funds
The procurement is related to a project and/or programme financed by European Union funds: no
II.2.14) Additional information

Section IV: Procedure

IV.1) Description
IV.1.1) Type of procedure
Open procedure
IV.1.3) Information about a framework agreement or a dynamic purchasing system
IV.1.6) Information about electronic auction
IV.1.8) Information about the Government Procurement Agreement (GPA)
The procurement is covered by the Government Procurement Agreement: yes
IV.2) Administrative information
IV.2.1) Previous publication concerning this procedure
Notice number in the OJ S: 2019/S 100-241728
IV.2.8) Information about termination of dynamic purchasing system
IV.2.9) Information about termination of call for competition in the form of a prior information notice

Section V: Award of contract

A contract/lot is awarded: no
V.1) Information on non-award
The contract/lot is not awarded
Other reasons (discontinuation of procedure)

Section VI: Complementary information

VI.3) Additional information:

Motivation for cancelling

The reason for cancellation is an insufficient degree of competition due to the fact that, only one tender is qualified, i.e. has fulfilled all mandatory requirements.

Visma notice: https://opic.com/id/affevqjfui

VI.4) Procedures for review
VI.4.1) Review body
Förvaltningsrätten i Stockholm
VI.4.2) Body responsible for mediation procedures
VI.4.3) Review procedure
VI.4.4) Service from which information about the review procedure may be obtained
VI.5) Date of dispatch of this notice:

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